HEATING SOLUTIONS for Semiconductor Capital Equipment
Heated Chuck Plates up to 450mm / 18"
or Call (770)655 4678 or (669)226 7815 for questions or to book a Meeting
Design and Manufacturing
Semiconductor CVD-ALD-PVD Heaters: Chucks, Coil heaters, Plates to 1000°C
Get to know the latest thermal innovations developed for the semiconductor process equipment.
THERMOCOAX thermal solutions help to improve the uptime and process stability of semiconductor and FPD process equipments. Our solutions can be found in ALD, CVD, PVD, MOCVD or etching tools.
Since over 57 years, we are manufacturing one of the most reliable mineral insulated cable on the market with a unique manufacturing process.
An independant study (*) shows that the failure rate of the nearest THERMOCOAX competitor is as much as 4 times higher than THERMOCOAX Cold End Heaters
(*) Study conducted on 1000's heaters in service over a period of 34 years
Flat Panel Display
NEW - Cleanroom
Low Contamination Heater
NEW - UHV/Atm Multi Thermocouples Assembly
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