Heaters and Sensors for Semiconductor Process Equipment
About us
SEMI - Patterning
SEMI - Deposition
SEMI - Removing Doping
FLAT PANEL DISPLAY - Heater process equipment
Thermocoax heaters for semiconductor applications
THERMOCOAX Thermocouples

Wafer Plate Heater 300°C
Wafer Plate Heater to 600°C
Wafer Plate Heater to 1000°C
Flat Panel Display Process equipment
VACCUM HEATERS I Coil Shaped Heater
OLED shower
Ovens
Heated Gas delivery lines
Heated hoses
Heating tape for clean room
Anticondensation Silicone Heating Mat
Mineral cable heaters
UHV VaccumThermocouples
Thermocouple type K, J, N
High temperature thermocouples
Commercial Field Experience
THERMOCOAX ISOPAD I Address

THERMOCOAX ISOPAD I Address
FLAT PANEL DISPLAY - Heater process equipment
SEMI - Deposition
SEMI - Patterning
SEMI - Removing Doping
Thermocoax heaters for semiconductor applications
THERMOCOAX Thermocouples
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THERMOCOAX ISOPAD I Address
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HEATING SOLUTIONS for Semiconductor Capital Equipment


Heated Chuck Plates up to 450mm / 18"

or Call (770)655 4678 or (669)226 7815 for questions or to book a Meeting

Design and Manufacturing

Semiconductor CVD-ALD-PVD Heaters: Chucks, Coil heaters, Plates to 1000°C

THERMOCOAX News

NEWSLETTER

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Get to know the latest thermal innovations developed for the semiconductor process equipment.

Why working with us ?

THERMOCOAX thermal solutions help to improve the uptime and process stability of semiconductor and FPD process equipments. Our solutions can be found in ALD, CVD, PVD, MOCVD or etching tools. 

Since over 57 years, we are manufacturing one of the most reliable mineral insulated cable on the market with a unique manufacturing process.


An independant study (*) shows that  the failure rate of the nearest THERMOCOAX competitor is as much as 4 times higher than THERMOCOAX Cold End Heaters


(*) Study conducted on 1000's heaters in service over a period of 34 years

 

Flat Panel Display

    GEN 10


Deposition

 

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Patterning

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Removing-Doping


 


Heaters

NEW - Cleanroom

Low Contamination Heater

  

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Thermocouples

NEW - UHV/Atm Multi Thermocouples Assembly

  

More Information  / Brochure Download